Boston Transducers '03
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Kluwer

EV Group Inc.
1210 Pontiac Avenue
Cranston, RI 02920
tel: 401-784-0008
fax: 401-784-9933
info@evgroup.at
www.EVGroup.com

EV Group (EVG) manufactures cutting-edge wafer processing equipment for MEMS, Microfluidics, SOI, Compound Semiconductor, MOEMS, Advanced Packaging and Power Devices markets. The product line includes: Manual and automated double-side mask/bond aligners for top and bottom side alignment. Wafer bonders for anodic, silicon fusion, thermo compression and SOI bonding. Wafer/mask cleaning systems (megasonic/brush). Automated resist processing systems, single/double-side photoresist spin/spray coaters and developers. Hot embossing and nanoimprinting systems.

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