Heidelberg Instruments 2807 Oregon Court, E2 Torrance, CA 90503 tel: 310-212-5071 fax: 310-212-5254 alexander.forozan@himt.de www.himt.de Heidelberg Instrument's DWL systems are high accuracy direct write pattern generators with automatic precision and metrology capabilities. Unique features of these systems include gray scale capability and exposure through thick resist. These systems are fast, flexible and reliable tools for applications such as integrated optics, MEMS, BioMEMS photo masks, etc.