microFAB Bremen GmbH Universitätsallee 5 D-28359 Bremen Germany tel: +49(0)421-24100-0 fax: +49(0)421-24100-99 www.microfab.de info@microfab.de microFAB Bremen is a leading service provider in the field of silicon-based micro-systems technology (MST) and a global supplier of customised microsystems (MEMS). Our production lines, located in two Class 10 to 100 cleanrooms, feature state-of-the-art facilities that permit wafers of 100 to 150 mm to be processed. microFAB provides standard MEMS production technologies like surface micromachining, bulk micromachining, silicon deep etching (DRIE, Bosch process), wafer bonding as well as 3D microforming. microFAB«s reference projects include piezoresistive and capacitive pressure and flow sensors, acceleration sensors and switches, fluid analysis sensors and highly sensitive silicon microphone chips, to name but a few. All of microFAB«s products are manufactured in compliance with DIN EN ISO 9001:2000, regardless of whether the production volumes are large or small.