Rad Dabbaj 5 Linchfield Road Datchet, Berkshire SL3 9NA United Kingdom tel: 44-1753-541 570 fax: 44-1753-541 571 email: rdabbaj@hotmail.com Introducing the VIACT™ - A new electrostatic MEMS actuator technology A new electrostatic MEMS actuator technology under the name VIACT™ (Versatile Integrated Actuator) will be exhibited, which is capable of realising a range of batch-fabricated 1D and 2D microactuators and microsensors. Among its main features include low-power, large out-of-plane deflection, flexible force vs. deflection characteristics and, uniquely, mask-configurable deflection direction allowing both up and down actuators to exist on the same batch. The technology basically comprises two structural polysilicon layers and one insulating layer and can be fabricated using conventional micromachining materials, processes and techniques. The VIACT™ is applicable to a wide range of 1D and 2D MEMS and MOEMS applications such as actuators, photonic switching, large-angle optical steering/scanning, differential-capacitor and force-balanced sensors, accelerometers, electrically-controlled diaphragm, microrobotics and micromechanics. The aim is to present the VIACT™ technology, highlight its potential and find interested partners or licensees to further develop and commercialise this significant advance in MEMS technology.