Short Course 7 Simulation of Micro and Nanosystems: Foundations, Emerging Techniques and Challenges Instructor: Narayana R. Aluru, University of Illinois, USA The objectives of this short course are to cover fundamental issues, emerging techniques and challenges in modeling and simulation of micro and nanosystems. Simulation of micro and nanosystems is challenging because of several reasons - inadequate characterization of new materials, different processing technologies, complex device geometries, presence of several mixed energy domains, break-down of classical physics or continuum theories, lack of automatic techniques to generate compact models or reduced-order models, inadequate tools for system-level analysis and several others. A range of topics will be covered in this short course to highlight the simulation issues specific to MEMS and nanotechnology. The topics to be covered in this course include: Introduction of sensor and actuator technologies at micro and nanoscales. Device modeling of micro and nanoscale devices including classical computational methods (finite-element and accelerated boundary-element methods), new computational methods (meshless methods for interior and exterior analysis), fast algorithms, algorithms for mixed-technology integration and multiscale methods combining classical and non-classical physics. Microfluidics including gas and liquid flows; pressure driven and electroosmotic flows; break-down of continuum theories; new continuum models; fundamentals in nanofluidics including fluid flow through carbon nanotubes and slit capillaries. Simulation of new materials (e.g. pH, electrically responsive and biomolecule responsive gels) for Bio-MEMS applications. Molecular techniques such as Monte Carlo and molecular dynamics methods. Dynamic analysis of micro and nanosystems including classical implicit and explicit methods, lumped models, reduced-order models based on basis-function and other approaches and compact models. Techniques for system-level analysis of MEMS and microfluidics.