ELECTROPLATED Co-Pt PERMANENT MAGNETS FOR MEMS
In this talk, I will summarize advancements in electroplated Co-Pt alloys as candidate permanent magnetic materials for wafer-level integration and realization of magnetic microsystems, such as sensors, actuators, powerMEMS, and bioMEMS. As a fabrication technology, electrodeposition offers advantages of speed, cost, and process integrability. Compared to other magnetic materials, Co-Pt alloys offer good energy density, high Curie temperature, and high corrosion-resistance. Specific attention is focused on the Co-rich composition (Co80Pt20) as well as the equiatomic composition (Co50Pt50) in the ordered L10 phase. This talk will expound on the electrodeposition of these two alloys, the resultant magnetic properties, and their usage in example microsystem applications.

CONCEPT TO COMMERCIALIZATION OF A MEMS-BASED BLAST DOSIMETRY SYSTEM
Traumatic brain injury (TBI) has emerged as the signature injury of modern war, impacting over 300,000 service members since 2000. While 82% of these injuries are classified mild, there is significant concern with the potential for long-lasting neurocognitive and neurodegenerative effects. Diagnosis of mild TBI is difficult, with symptoms that are wide-ranging, non-specific, and often delayed in onset. The Blast Gauge™ System was created to provide an objective measure of blast overpressure and acceleration exposure, providing triage data to assist in identifying soldiers at risk of TBI, and detailed waveforms to enable correlation of singular and repetitive exposure to acute and chronic injury. From concept to deployment in 11 months and company formation to first product shipment in 4 months, this MEMS-based soldier-borne blast dosimeter has rapidly provided a new capability to track exposure in training and operations for the US DoD, law enforcement, and international militaries. Widespread deployment of the technology has yielded new insight into previously unrecognized dangers of heavy weapons training and captured valuable information about IED exposures in theater.

EFFICIENTLY CONTROLLING SINGLE MAGNETIC DOMAINS STRUCTURES WITH NANOSCALE MULTIFERRROICS

INERTIAL-BASED ALGORITHM CONCEPTS FOR NEUROLOGICAL CONDITIONS: A SURVEY OF CURRENT SCIENTIFIC TRENDS AND TECHNICAL CHALLENGES
The emergence of micropower inertial sensors is enabling opportunities for embedding sensors both within medical implants and in distributed peripheral instrumentation. Inertial sensing inside the body got its start with rate-responsive cardiac pacing. Building on that concept, accelerometers were adapted for use in the first adaptive neuromodulation system, which provides real-time posture and activity feedback to a spinal cord stimulator implanted for the treatment of chronic pain. This paper provides a survey of new technology concepts being explored for neurological disorders, including both the neuroscience basis for the algorithms and the technical hurdles that remain for their implementation.

HOW MATERIALS INNOVATIONS WILL LEAD TO DEVICE REVOLUTION?
Transparent electronics has arrived and is contributing for generating a free real state electronics that is able to add new electronic functionalities onto surfaces, which currently are not used in this manner and where silicon cannot contribute. The already high performance developed n- and p-type TFTs have been processed by physical vapour deposition (PVD) techniques like rf magnetron sputtering at room temperature which is already compatible with the use of low cost and flexible substrates (polymers, cellulose paper, among others). Besides that a tremendous development is coming through solution-based technologies very exciting for ink-jet printing, where the theoretical limitations are becoming practical evidences. In this presentation we will review some of the most promising new technologies for n- and p-type thin film transistors based on oxide semiconductors and its currently and future applications.

PHYSICAL SENSORS FOR FLUIDS
Modern process control and condition monitoring applications frequently require information on the state or composition of (process) fluids. Often such sensors are chemical sensors achieving the required specificity by means of chemical reactions taking place in a chemical interface which is placed on a physical sensor. Here, chemical reactions with substances in the fluid change some physical property of the interface (e.g., density or conductivity), which is the final parameter being sensed. However, chemical interfaces often do not conform to the requirements in terms of robustness, e.g., in industrial applications. As an alternative, physical parameters of the fluid can be sensed such that no chemical interface is required. This approach works particularly well, if the monitored process is well understood and thus the physical parameters are clearly correlated to the chemical information that is actually required. The quality of this relation can often be further improved by utilizing physical sensor arrays yielding additional correlations. Examples for physical parameters are thermal and electrical conductivity, permittivity, viscosity, speed of sound, and density. In this contribution these concepts are reviewed with a particular focus on mechanical fluid properties. We discuss issues arising with complex fluids, suitable sensor designs in different technologies, and illustrate these aspects by means of examples.

SMART (SHRINK MANUFACTURING ADVANCED RESEARCH TOOLS)
The challenge of micro- and nano-fabrication lies in the difficulties and costs associated with patterning at such high resolution. To make such promising technology - which could enable pervasive health monitoring and disease detection/surveillance - more accessible and pervasive, there is a critical need to develop a manufacturing approach such that prototypes as well as complete manufactured devices cost only pennies. To accomplish this, instead of relying on traditional fabrication techniques largely inherited from the semiconductor industry, we have pioneered a radically different approach. Leveraging the inherent heat-induced relaxation of pre-stressed thermoplastic sheets - commodity shrink-wrap film - we pattern in a variety of ways at the large scale and achieve our desired structures by controlled shrinking down to 5% of the original, patterned sizes. This enables us to 'beat' the limit of resolution inherent to traditional 'top-down' manufacturing approaches. With these tunable shape memory polymers, compatible with roll-to-roll as well as lithographic processing, we can robustly integrate extremely high surface area and high aspect ratio nanostructures directly into our microsystems. Importantly, our metallic nano structures (self-assembled due to the stiffness mismatch between the thin metal film deposited on the retracting plastic sheet) have demonstrated unprecedented electromagnetic field enhancements. This ultra rapid fabrication approach therefore results in field-compatible plastic based microfluidic systems with integrated nanostructures for robust signal amplification. This design-on-demand approach to create a suite of custom biomedical tools for low cost diagnostics including sample prep with magnetic nanotraps, embedded on-chip electrodes, microlens arrays, surface enhanced sensing substrates, patternable superhydrophobic surfaces for channeless microfluidics, and flexible electronics.

SMALL, SOFT AND SAFE MICRO-MACHINES FOR BIOMEDICAL APPLICATIONS
The talk introduces small, soft, and safe (S3) micro-machines for various biomedical applications. We have developed a polymer-based pneumatic balloon actuator (PBA) as S3 actuator. Polymers such as PDMS and polyimide allow soft and flexible structure for PBA. Pneumatic driving principle provides safe operation. Various biomedical applications of PBA including a retractor for endoscopic surgery, a transplantation tool for eye surgery, and cellular aggregates manipulation for tissue engineering will be presented.

TRANSLATIONAL RESEARCHES FROM LAB TO HOSPITAL: RAPID ANTIBIOTIC SUSCEPTIBILITY TEST
I will present recent examples in my lab that successfully made translation from lab invention to hospital usage. A rapid antibiotic susceptibility test (RAST) is desperately needed in clinical settings for fast and appropriate antibiotic administration. Traditional ASTs are not suitable for urgent cases of bacterial infection and antibiotic resistance due to their relatively long test time. I will present a fast AST method named single-cell morphological analysis (SCMA) that can determine antimicrobial susceptibility by analyzing and categorizing morphological changes in single bacterial cells under various antimicrobial conditions. With SCMA, AST is finished only in 3 hours satisfying FDA guidelines. I will discuss application of SCMA to fast diagnostics of multi-drug resistant tuberculosis.

ALTERNATIVE POWER SOURCES FOR MINIATURE AND MICRO DEVICES
Energy harvesting, which in the modern literature can be traced back to the late 90s, has been thought of as a ground breaking substitute for exhaustible energy sources for powering miniature devices. However, there are still very few areas in which harvesters, at either the MEMS or macro-scale, have made significant impact. In comparison, a different technological solution to the same problem, that of wireless power delivery, either as near or far field electromagnetic transfer, is already gaining traction in several areas from charging electric vehicles to powering wireless sensors. In this talk I will review the state of the art in each of these areas, discuss current innovations and discuss and compare the potential for future development of these two alternatives to batteries.

ELECTRET-BASED VIBRATION ENERGY HARVESTING FOR SENSOR NETWORK
Energy harvesting is an enabling technology for wireless sensor network and low-power-consumption wearable devices. Among various energy sources in the environment, structural vibration and human motion are most abundantly distributed. Since kinetic energy of the vibration is mainly located in the low-frequency range, electrostatic induction generator using electrets attracts much attention. In this talk, recent advances of electret materials, charging methods, and device technologies are reviewed, and rich opportunity of MEMS technologies for further developments will be discussed.

SUFACE DESIGN FOR HIGH-SENSITIVITY MICRO-BIOSENSOR
To obtain high-sensitivity on biosensor for instance immunoassay, the amount of immobilized antibody should be increased and the orientation of immobilized antibody should be controlled. Moreover the decrease of non-specific protein adsorption also is requested to decrease the noise. Two typed bio-conjugated interfaces to be achieved highly sensitive immunoassay were developed by integrating a phospholipid polymer, which is cell-membrane mimetic material. In this paper, overview of surface design for high-sensitivity micro-biosensor is presented.

DETECTION OF CANCER BIOMARKERS IN SERUM BY MERGING NANOMECHANICS AND OPTOPLASMONICS

HOW MICROTECHNOLOGIES ENABLE ORGANS-ON-A-CHIP

AXICONS ET AL. - HIGHLY ASPHERIC OPTICAL ELEMENTS FOR THE LIFE SCIENCES
Aspheric lenses or mirrors are used to correct abberations in all kinds of optical systems. In telescopes, for example, the correction needs to be dynamic, and hence a tunable asphericity and higher-order correction are mandatory, and are typically realized by an array of individually controllable mirror segments. The presentation will discuss several new concepts of tunable highly aspheric micro optical elements for various other purposes. It will focus on tunable micro axicons, but also present some free-form approaches, all of which are controlled by means of piezo electric actuators or by thermal expansion. The components are fabricated outside of the cleanroom using laser micro-structuring and polymer casting. Illuminated with ultra short laser pulses they produce variable Bessel or vortex beams which, in case of reflective elements, are almost dispersion free. Applications in life sciences range from the neuro-sciences to magnetic resonance imaging.

ON-CHIP ENERGY STORAGE DEVICES BASED ON PROTOTYPING OF PATTERNED NANOPOROUS CARBON
Today's rapid growth of portable electronic equipment, wireless sensor networks and other micro systems is driving an increasing demand for better power supply and energy storage under various conditions. With the advantages of high charge/discharge rate, long cycle life and high energy efficiency, supercapacitors can bridge the gap between traditional capacitors and batteries, and are of the same importance as rechargeable batteries to energy storage systems. In order to develop an effective and direct way for batch fabrication of micro energy storage devices at wafer level, we demonstrate an idea of incorporating nano templating method into photolithography technology. Based on this prototyping of patterned nanoporous carbon electrode, we achieved 3D micro supercapacitors, silicon-based anode Li-ion batteries, as well as asymmetric supercapacitor-batteries.

THE ERA OF SILICON MEMS MICROPHONE AND LOOK BEYOND
After had been long incubated originally for miniature hearing aid application, silicon condenser microphone found its adoption in mobile phone applications 10 years ago and has since then explosively grown to one of the most pursuit products in the MEMS industry. Development of silicon MEMS microphone looks simple but has many intrinsically hidden issues and challenges to overcome and solve. Lessons and experience from both failed and successful developments will be shared. Future outlook of its application roadmap will be envisioned. As being driven by fast paced mobile phones and smart devices, silicon MEMS microphone may soon encounter its technical boundary and restraints. Potential disruptive solutions for sustaining growth will be discussed in this talk.