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memsstar®
Starlaw Park, Starlaw Road
Livingston EH54 8SF UK
phone: +44 (0) 1506409160
fax: +44 (0) 1506464300
www.memsstar.com
Booth 42
memsstar® is a global leader in the provision of technology and systems to the MEMS (Micro Electrical Mechanical Systems) and integrated semiconductor markets. memsstar® uses vapour phase single wafer processing for the release etch and surface modification process steps as required in most MEMS devices. With unique CCFT™ process control technology and an extensive range of chemistries, users get a wide process window and integrated process controls which far exceed other currently available systems and methods. memsstar® systems deliver fast throughput, small footprint, low consumption and emissions, scalable platforms, process controls and high repeatability at a low entry level cost. System configurations can be matched to suit any situation from R&D to high throughput production
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