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Tegal Corporation
2201 S. McDowell Blvd.
Petaluma, CA 94954 USA
phone: 1-707-765-5608
fax: 1-707-773-3015
www.tegal.com
Booth 32
Tegal is an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronics. We combine proven expertise with practical system strategies to deliver application-specific solutions that are robust and reliable, for applications such as: Silicon DRIE MEMS Etch; PVD and Plasma Etch for AlN, PZT, and other Piezoelectric Films; Precision Descum; Stress-Controlled PVD for Metal Films on Thin Wafers
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