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Booth # Exhibitor Booth # Exhibitor 1 CIRFE Lab 25 Journal of Micromech. and Microengineering 2 Electret Energy Harvester Alliance 26 NB-Technologies GmbH 3 Rogue Valley Microdevices, Inc. 27 Microsystems & Nanoengineering / Nature 4 Silex Microsystems, Inc. 28 samco Inc. 5 Washington Nanofabrication Facility 29 Asia Pacific Microsystems, Inc. 6 Available 30 Andeen-Hagerling, Inc. 7 Available 31 Available 8 Fraunhofer Institute for Silicon Technology 32 TANAKA Precious Metals 9 Femtotools AG 33 Polytec Inc. 10 Femtotools AG 34 GLOBALFOUNDRIES & IME, A*STAR 11 IntelliSense 35 Brewer Science Inc. 12 Freescale 36 Silicon Sensing Systems 13 OAI Lithography 37 Coventor, Inc. 14 Micrel 38 Transducers 2017 15 AMFitzgerald 39 Available 16 Oxford Instruments 40 SPTS Technolgies 17 ROHM Semiconductor U.S.A., LLC 41 Crestec Corporation 18 Available 42 Available 19 memsstar LTD 43 Available 20 Heidelberg Instruments Inc. 44 MiQro Innovation Collaborative Center 21 SoftMEMS 45 Tousimis 22 DJ DevCorp 46 Femto Science Inc. 23 Nanoscribe GmbH 47 Available 24 Georgia Tech 48 Available TT MEMS Industry Group TT MIST Center TT Tufts University

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