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Microsystems & Nanoengineering/Nature Publishing Group 4210-11 42F, The Center, 989 Changle Road Shanghai, 200031 CHINA phone: +8621-2422-5005 email: micronano@nature.com www.nature.com/micronano Institute of Electronics of Chinese Academy of Sciences No.19, North Fourth Ring Road West Beijing 100190, CHINA phone: +86-10-5888 7064 fax: +86-10-5888 7539 email: mems_nano@mail.ie.ac.cn Booth 27 |