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MEMS, Biotech, EWOD, Nano imprint,... etc. applications, based on its proprietary low temperature vapor phase deposition technology and modularized chemical supply system. IST fulfills every level of surface engineering requirements by customers. From bench top tools for R&D and pilot production, to full size manufacturing systems, IST supplies the equipment, chemistry and engineering services to meet customers' needs. Typical applications include anti-stiction films, adhesion promoters, bio reactive films, hydrophilic to super-hydrophobic films and atomic layer deposition (ALD) of inorganic oxides.