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MUEGGE is the leading international manufacturer and supplier of Microwave Power Systems for advanced Industrial Microwave Heating and Plasma Applications. Its portfolio includes Plasma Batch Etcher for various applications. Muegge's Rapid Reactive Radicals Technology (R3T) is ideal for photoresist ashing (perfect for SU-8), descum, wafer cleaning, surface activation and silicon/silicon nitride etching and decapsulation. Plasma Source & Microwave Technologies - Made in Germany.