Tuesday 25 June
Session T2B - E&M Field Sensors II
Title: QUANTUM SENSORS IN DIAMOND: TECHNOLOGY ROADMAP
Presenter: Christian Degen
Affiliation: ETH Zürich
Time: 11:15 - 11:45
Session T2C - Ultrasonic II
Title: MEMS TRANSDUCERS FOR NON-INVASIVE ULTRASOUND BRAIN STIMULATION
Presenter: Hyunjoo J. Lee
Affiliation: Korea Advanced Institute of Science and Technology (KAIST)
Time: 11:45 - 12:15
Session T2E - Fabrication Technologies II
Title: EVOLVING FUNCTIONALITY IN DISORDERED NANOSYSTEMS
Presenter: Wilfred G. van der Wiel
Affiliation: University of Twente
Time: 12:15 - 12:45
Session T4E - Assembly & Self-Assembly
Title: PRECISE PLACEMENT OF NANO-SPHERES AND -WIRES UTILIZING BROWNIAN MOTORS IN A TUNABLE NANOFLUIDIC CONFINEMENT
Presenter: Armin W. Knoll
Affiliation: IBM Research
Time: 16:30 - 17:00
Wednesday 26 June
Session W1B - Accelerometers and Gyros I
Title: FREQUENCY MODULATED MEMS GYROSCOPES: RECENT DEVELOPMENTS, CHALLENGES AND OUTLOOK
Presenter: Giacomo Langfelder
Affiliation: Politecnico di Milano
Time: 09:45 - 10:15
Session W1D - Tactile Sensors I
Title: ADVANCEMENTS IN POLYMERIC CAPACITIVE TACTILE SENSORS
Presenter: Cheng-Yao Lo
Affiliation: National Tsing Hua University
Time: 10:15 - 10:45
Session W2A - Cell on a Chip I
Title: UNLOCKING BIOMEDICAL DISCOVERIES THROUGH VOLUME PRODUCTION OF NANOPATTERNED MATERIALS
Presenter: Nikolaj Gadegaard
Affiliation: University of Glasgow
Time: 12:15 - 12:45
Session W2C - RF MEMS II
Title: 3G - 4G - 5G: HOW BAW FILTER TECHNOLOGY ENABLES A CONNECTED WORLD
Presenter: Robert Aigner
Affiliation: Qorvo Inc.
Time: 11:15 - 11:45
Session W2E - Optical Biosensors
Title: INTEGRATING MICROSYSTEMS WITH METAMATERIALS TOWARDS METADEVICES
Presenter: Xin Zhang
Affiliation: Boston University
Time: 11:45 - 12:15
Session W4E - Mixed Session
Title: HIGH PERFORMANCE PIEZOELECTRIC AlN MEMS RESONATORS FOR LIQUID SENSING AND BEYOND - THE POTENTIAL OF PIEZOMEMS
Presenter: Ulrich Schmid
Affiliation: Vienna University of Technology
Time: 16:30 - 17:00
Thursday 27 June
Session Th2B - Gas Sensors
Title: SMART ENVIRONMENTAL SENSOR SYSTEMS FOR A DIGITAL AND SUSTAINABLE WORLD
Presenter: Markus Graf
Affiliation: Sensirion Automotive Solutions AG
Time: 11:15 - 11:45
Session Th2C - Energy & Power MEMS II
Title: PIEZOELECTRIC PZT THIN FILMS: DEPOSITION, EVALUATION AND THEIR APPLICATIONS
Presenter: Isaku Kanno
Affiliation: Kobe University
Time: 11:45 - 12:15
Session T2B - E&M Field Sensors II
Title: QUANTUM SENSORS IN DIAMOND: TECHNOLOGY ROADMAP
Presenter: Christian Degen
Affiliation: ETH Zürich
Time: 11:15 - 11:45
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Diamond has emerged as a unique material for a variety of applications, both because it is very robust and because it has defects with interesting properties. One of these defects, the nitrogen-vacancy color center (NV center) shows quantum behavior up to above room temperature. We are exploring diamond as a platform for realizing nanoscale sensors with exquisite sensitivities and new capabilities.
Diamond has emerged as a unique material for a variety of applications, both because it is very robust and because it has defects with interesting properties. One of these defects, the nitrogen-vacancy color center (NV center) shows quantum behavior up to above room temperature. We are exploring diamond as a platform for realizing nanoscale sensors with exquisite sensitivities and new capabilities.Session T2C - Ultrasonic II
Title: MEMS TRANSDUCERS FOR NON-INVASIVE ULTRASOUND BRAIN STIMULATION
Presenter: Hyunjoo J. Lee
Affiliation: Korea Advanced Institute of Science and Technology (KAIST)
Time: 11:45 - 12:15
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Non-invasive brain stimulation is a promising alternative therapeutic means for brain disorders. Among various modalities, ultrasound offers distinct advantages such as non-invasiveness, focusing capability, and in-depth targeting. This talk will describe the design, implementation, and in vivo results of our miniature MEMS ultrasound transducer, a CMUT ring array, designed for non-invasive neuromodulation for freely-moving small animals. In addition, a short critical review of the potential mechanisms for ultrasound neuromodulation will be presented.
Non-invasive brain stimulation is a promising alternative therapeutic means for brain disorders. Among various modalities, ultrasound offers distinct advantages such as non-invasiveness, focusing capability, and in-depth targeting. This talk will describe the design, implementation, and in vivo results of our miniature MEMS ultrasound transducer, a CMUT ring array, designed for non-invasive neuromodulation for freely-moving small animals. In addition, a short critical review of the potential mechanisms for ultrasound neuromodulation will be presented.Session T2E - Fabrication Technologies II
Title: EVOLVING FUNCTIONALITY IN DISORDERED NANOSYSTEMS
Presenter: Wilfred G. van der Wiel
Affiliation: University of Twente
Time: 12:15 - 12:45
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Natural and man-made information processing systems differ greatly. Evolution has resulted in living systems that utilize whatever physical properties are exploitable to enhance the fitness for survival. Nature thereby exploits the emergent properties and massive parallelism of highly interconnected networks of locally active components. Man-made computers, however, are based on circuits of functional units, following rigid design rules. In conventional computational paradigms, potentially exploitable physical processes to solve a problem, are possibly left out. Here, we propose to manipulate physical systems using computer-controlled evolution, to take full advantage of the computational power of nanomaterials.
Natural and man-made information processing systems differ greatly. Evolution has resulted in living systems that utilize whatever physical properties are exploitable to enhance the fitness for survival. Nature thereby exploits the emergent properties and massive parallelism of highly interconnected networks of locally active components. Man-made computers, however, are based on circuits of functional units, following rigid design rules. In conventional computational paradigms, potentially exploitable physical processes to solve a problem, are possibly left out. Here, we propose to manipulate physical systems using computer-controlled evolution, to take full advantage of the computational power of nanomaterials.Session T4E - Assembly & Self-Assembly
Title: PRECISE PLACEMENT OF NANO-SPHERES AND -WIRES UTILIZING BROWNIAN MOTORS IN A TUNABLE NANOFLUIDIC CONFINEMENT
Presenter: Armin W. Knoll
Affiliation: IBM Research
Time: 16:30 - 17:00
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We demonstrate a novel concept to transport and immobilize particles at defined target positions on a substrate. The high level of control we gain over the particles relies on a lithographically defined energy landscape in a tunable nanofluidic slit. The landscape allows us to selectively transport the particles to the target location employing Brownian motor concepts. At the target location electrostatic traps are used to localize the particles and to force them into the correct orientation. We demonstrate the deposition of nano-spheres, rods and wires onto pre-defined electrodes.
We demonstrate a novel concept to transport and immobilize particles at defined target positions on a substrate. The high level of control we gain over the particles relies on a lithographically defined energy landscape in a tunable nanofluidic slit. The landscape allows us to selectively transport the particles to the target location employing Brownian motor concepts. At the target location electrostatic traps are used to localize the particles and to force them into the correct orientation. We demonstrate the deposition of nano-spheres, rods and wires onto pre-defined electrodes.Wednesday 26 June
Session W1B - Accelerometers and Gyros I
Title: FREQUENCY MODULATED MEMS GYROSCOPES: RECENT DEVELOPMENTS, CHALLENGES AND OUTLOOK
Presenter: Giacomo Langfelder
Affiliation: Politecnico di Milano
Time: 09:45 - 10:15
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After about ten years of researches by different groups, this work summarizes the various frequency-modulated techniques for microelectromechanical system (MEMS) based gyroscopes. It then focuses on low-power integrated electronics for Lissajous FM rate sensors and on the conditions to guarantee high offset stability over temperature. Recent results in terms of scale-factor drift and offset drift over temperature on a complete Lissajous FM gyroscope with full digital output are reported.
After about ten years of researches by different groups, this work summarizes the various frequency-modulated techniques for microelectromechanical system (MEMS) based gyroscopes. It then focuses on low-power integrated electronics for Lissajous FM rate sensors and on the conditions to guarantee high offset stability over temperature. Recent results in terms of scale-factor drift and offset drift over temperature on a complete Lissajous FM gyroscope with full digital output are reported.Session W1D - Tactile Sensors I
Title: ADVANCEMENTS IN POLYMERIC CAPACITIVE TACTILE SENSORS
Presenter: Cheng-Yao Lo
Affiliation: National Tsing Hua University
Time: 10:15 - 10:45
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This paper discloses the recent advancements in capacitive tactile sensors (CTSs) that are mostly composed of polymeric materials: The add-on function of a CTS that supports normal and shear force detection, the angular resolution of a CTS that distinguishes the shear force applied along a specific angle in the xy-plane, the spatial resolution improvement on the CTS, the sensitivity enhancement in both normal and shear force detections, the suppression of detection tolerance generated during fabrication, and the working range expansion of a CTS.
This paper discloses the recent advancements in capacitive tactile sensors (CTSs) that are mostly composed of polymeric materials: The add-on function of a CTS that supports normal and shear force detection, the angular resolution of a CTS that distinguishes the shear force applied along a specific angle in the xy-plane, the spatial resolution improvement on the CTS, the sensitivity enhancement in both normal and shear force detections, the suppression of detection tolerance generated during fabrication, and the working range expansion of a CTS.Session W2A - Cell on a Chip I
Title: UNLOCKING BIOMEDICAL DISCOVERIES THROUGH VOLUME PRODUCTION OF NANOPATTERNED MATERIALS
Presenter: Nikolaj Gadegaard
Affiliation: University of Glasgow
Time: 12:15 - 12:45
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Biomedical research relies on large datasets thus the need for large samples numbers and in many cases disposable devices demands manufacturing routes for cheap and fast sample production. Injection moulding meets those requirements where 100s of devices per hour can be manufactured. Where initial research focused on nanoscale replication, current interests are sparked around diagnostic devices with micron or sub-milimeter dimensions. Fueling this evolution is the advent of 3D printing where tooling quickly can be manufacturing without the need of specialized infrastructure.
Biomedical research relies on large datasets thus the need for large samples numbers and in many cases disposable devices demands manufacturing routes for cheap and fast sample production. Injection moulding meets those requirements where 100s of devices per hour can be manufactured. Where initial research focused on nanoscale replication, current interests are sparked around diagnostic devices with micron or sub-milimeter dimensions. Fueling this evolution is the advent of 3D printing where tooling quickly can be manufacturing without the need of specialized infrastructure.Session W2C - RF MEMS II
Title: 3G - 4G - 5G: HOW BAW FILTER TECHNOLOGY ENABLES A CONNECTED WORLD
Presenter: Robert Aigner
Affiliation: Qorvo Inc.
Time: 11:15 - 11:45
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5G is highly anticipated by service providers, phone manufacturers and consumers. 5G marks a dramatic increase in data rates. The number of frequency bands requiring high performance filters increases significantly. BAW is particularly well suited for new bands below 6 GHz, many of which have very wide bandwidth and close-by neighbors. The only path forward to achieve full connectivity in LTE 4G + 5G wireless is RF integration; complexity of the antenna systems and the resulting coexistence challenges will dictate it. The article discusses trends for BAW, wide bandwidth and miniaturization.
5G is highly anticipated by service providers, phone manufacturers and consumers. 5G marks a dramatic increase in data rates. The number of frequency bands requiring high performance filters increases significantly. BAW is particularly well suited for new bands below 6 GHz, many of which have very wide bandwidth and close-by neighbors. The only path forward to achieve full connectivity in LTE 4G + 5G wireless is RF integration; complexity of the antenna systems and the resulting coexistence challenges will dictate it. The article discusses trends for BAW, wide bandwidth and miniaturization.Session W2E - Optical Biosensors
Title: INTEGRATING MICROSYSTEMS WITH METAMATERIALS TOWARDS METADEVICES
Presenter: Xin Zhang
Affiliation: Boston University
Time: 11:45 - 12:15
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Metamaterials, artificially engineered materials with extraordinary and controllable effective properties, have expedited the development of photonic and optical devices. Microsystems, or microelectromechanical systems (MEMS), provide powerful platforms to control the effective properties of metamaterials and integrate various functions into metamaterials. In this paper, we present the fundamentals of metamaterials, integration schemes of MEMS and metamaterials, and outlooks for metamaterial enabled photonic devices.
Metamaterials, artificially engineered materials with extraordinary and controllable effective properties, have expedited the development of photonic and optical devices. Microsystems, or microelectromechanical systems (MEMS), provide powerful platforms to control the effective properties of metamaterials and integrate various functions into metamaterials. In this paper, we present the fundamentals of metamaterials, integration schemes of MEMS and metamaterials, and outlooks for metamaterial enabled photonic devices.Session W4E - Mixed Session
Title: HIGH PERFORMANCE PIEZOELECTRIC AlN MEMS RESONATORS FOR LIQUID SENSING AND BEYOND - THE POTENTIAL OF PIEZOMEMS
Presenter: Ulrich Schmid
Affiliation: Vienna University of Technology
Time: 16:30 - 17:00
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Piezoelectric MEMS resonators based on advanced aluminium nitride thin films are a promising and versatile technology platform to tackle a multitude of sensory challenges. In this talk, we will give an overview on recent achievements in this field focusing on potential applications for e.g. sensing the viscosity and density of liquids and serving as integrated transducers to push the performance of buckled membranes.
Piezoelectric MEMS resonators based on advanced aluminium nitride thin films are a promising and versatile technology platform to tackle a multitude of sensory challenges. In this talk, we will give an overview on recent achievements in this field focusing on potential applications for e.g. sensing the viscosity and density of liquids and serving as integrated transducers to push the performance of buckled membranes.Thursday 27 June
Session Th2B - Gas Sensors
Title: SMART ENVIRONMENTAL SENSOR SYSTEMS FOR A DIGITAL AND SUSTAINABLE WORLD
Presenter: Markus Graf
Affiliation: Sensirion Automotive Solutions AG
Time: 11:15 - 11:45
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The world´s progressing digitalization has generated a wave of omnipresent megatrends such as Industry 4.0, Internet of Things and Artificial Intelligence. Many of the related innovations are driven by sophisticated functionalities, which become only possible by recent progress in sensor miniaturization. Indeed, miniaturized sensors are essential for accessing and collecting data of the environmental context, thus enabling undreamt applications. First, the concept of smart sensor systems and the "sensing-star" model for describing their key characteristics are introduced. Second, it is discussed, how in this holistic approach the systems design is influenced and embedded in the context.
The world´s progressing digitalization has generated a wave of omnipresent megatrends such as Industry 4.0, Internet of Things and Artificial Intelligence. Many of the related innovations are driven by sophisticated functionalities, which become only possible by recent progress in sensor miniaturization. Indeed, miniaturized sensors are essential for accessing and collecting data of the environmental context, thus enabling undreamt applications. First, the concept of smart sensor systems and the "sensing-star" model for describing their key characteristics are introduced. Second, it is discussed, how in this holistic approach the systems design is influenced and embedded in the context.Session Th2C - Energy & Power MEMS II
Title: PIEZOELECTRIC PZT THIN FILMS: DEPOSITION, EVALUATION AND THEIR APPLICATIONS
Presenter: Isaku Kanno
Affiliation: Kobe University
Time: 11:45 - 12:15
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Piezoelectric thin films have attracted attention as key materials of next generation functional micro-devices. The characteristic features of piezoelectric MEMS, especially focusing on the deposition of the PZT thin films, and the evaluation of piezoelectric thin films will be presented from the viewpoint of design and fabrication of piezoelectric MEMS devices.
Piezoelectric thin films have attracted attention as key materials of next generation functional micro-devices. The characteristic features of piezoelectric MEMS, especially focusing on the deposition of the PZT thin films, and the evaluation of piezoelectric thin films will be presented from the viewpoint of design and fabrication of piezoelectric MEMS devices.